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Gas injection system
发布时间：2023-06-21 15:50
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File size: 23.0MB
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File size: 12.5MB
The Dalex-100 gas injection system provides Pt, W, and C for deposition protection during cross-section and TEM sample preparation, Pt, W, and SiO2 for circuit repair, and XeF2 to increase Si cutting rates. In addition, it can also provide other special precursor gases for milling or gas dry etching of certain materials.
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